MEMS Devices

JENOPTIK Microoptics has the knowledge and tools to perform detailed design and analysis for a variety of micro machined devices. Finite element analysis tools, process simulation tools and custom codes are used to perform detailed design and analysis services. Manufacturability is always taken into consideration during the design phase. A state of the art in house fabrication facility allows quick turns on manufacturing and unique process solutions to your most difficult challenges.

Two Axis Tilt Mirrors

The scanning two axis tilt mirror is an important technology that can be used in many industries. Two axis scanning allows these mirrors to have a full 360° of rotation at up to a 3° tilt angle. There are several major benefits of the JENOPTIK Microoptics tilt mirror over competing products.

• The tilt angle is analog as opposed to on-off.
• There are no holes in the mirror surface, allowing for full reflection of all impinging light.
• Low voltages are required for actuation. A total of less than 120 volts is required for the full 3° of tilt and less voltage is required for less tilt.

Hybrid Microoptical Elements

The combination of several technologies and methods makes it possible for JENOPTIK Microoptics to integrate microoptical functions with plane optics, coating technology and precision machining. Our hybrid microoptical elements realize complex optical functionalities with high precision and stability. The monolithic design of this elements avoids any issues related to mounting materials or mounting precision. Additionally, precise assemblies with further components are available for applications requiring the integration of different materials.

Computer Generated Holograms (CGH)

A CGH is a binary representation of an interferogram where the JENOPTIK Microoptics product is a phase hologram due to the pattern is etched into the substrate. CGHs can be used with existing commercial interferometers. CGHs are produced with E-beam nanolithography allowing for very accurate critical dimensions and position precision.

Neutral Density Filters

Digital neutral density filters are used to control the intensity profiles in illuminations and projection systems. These filters contain well-defined matal absorber micro-structures that are randomly distributed on a fused silica substrate. The density and size of the structures can be customized to meet precisely the transmission profile required by the application. One- and two-dimensional profiles are available.